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Plasma Ion Injection Device "PUPION Series"

Minimize radioactive contamination! Capable of proposing plasma excitation technology tailored to specific applications.

The "PUPION series" is a plasma ion implantation device. It is used for shallow depth doping in nanoelectronics and photonics, as well as for medical-grade radioactive isotopes in beta radiation therapy. It minimizes radioactive contamination during the injection of radioactive isotopes and allows for the proposal of plasma excitation technologies tailored to specific applications. 【Features】 ■ Shallow depth doping in nanoelectronics and photonics, and beta radiation therapy ■ Medical-grade radioactive isotopes ■ Minimizes radioactive contamination during the injection of radioactive isotopes ■ Capable of proposing plasma excitation technologies according to application needs *For more details, please refer to the PDF document or feel free to contact us.

  • Ion implantation equipment

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